Coating Deposition by Condensing the Particle Flux from the Target Sputtered in the Low-Pressure Arc Plasma

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

291-294

DOI:

10.4028/www.scientific.net/MSF.287-288.291

Citation:

I.I. Aksenov and V.M. Khoroshikh, "Coating Deposition by Condensing the Particle Flux from the Target Sputtered in the Low-Pressure Arc Plasma", Materials Science Forum, Vols. 287-288, pp. 291-294, 1998

Online since:

August 1998

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$35.00

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