Study of a Pulsed DC Glow-Discharge Used for Plasma-CVD with an Ultrafast Videosystem and a Langmuir-Probe

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

299-302

DOI:

10.4028/www.scientific.net/MSF.287-288.299

Citation:

T.A. Beer et al., "Study of a Pulsed DC Glow-Discharge Used for Plasma-CVD with an Ultrafast Videosystem and a Langmuir-Probe", Materials Science Forum, Vols. 287-288, pp. 299-302, 1998

Online since:

August 1998

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$35.00

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