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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Study of a Pulsed DC Glow-Discharge Used for...

Study of a Pulsed DC Glow-Discharge Used for Plasma-CVD with an Ultrafast Videosystem and a Langmuir-Probe

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

299-302

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.299

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Online since:

August 1998

Authors:

T.A. Beer, D. Heim, J. Laimer, H. Störi

Keywords:

Langmuir Probe, Plasma Dynamic, Plasma-CVD, Pulsed DC Discharge, Videosystem

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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