Flowfill-Process as a New Concept for Inter-Metal-Dielectrics

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

235-238

DOI:

10.4028/www.scientific.net/MSF.287-288.235

Citation:

U. Höckele et al., "Flowfill-Process as a New Concept for Inter-Metal-Dielectrics", Materials Science Forum, Vols. 287-288, pp. 235-238, 1998

Online since:

August 1998

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Price:

$35.00

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