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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Material-Selective Planarization of Oxide Layers:...

Material-Selective Planarization of Oxide Layers: A Novel Technology

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Trends and New Applications of Thin Films

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

227-230

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.227

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Online since:

August 1998

Authors:

Th. Detzel, P. Hanesch

Keywords:

Oxide Layer, Planarization

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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