High Rate Deposition of Thick Oxide Layers on Plastic Substrates

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

189-192

DOI:

10.4028/www.scientific.net/MSF.287-288.189

Citation:

H. Morgner et al., "High Rate Deposition of Thick Oxide Layers on Plastic Substrates", Materials Science Forum, Vols. 287-288, pp. 189-192, 1998

Online since:

August 1998

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Price:

$35.00

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