In-Situ Control of Stoichiometry in Room Temperature MBE-Growth of ZrO2 Thin Films Using a Novel Hyperthermal Oxygen Atom Source
p.181
p.181
Surface Analysis of Hard Coatings Deposited by Modified Pulse Arc Process
p.185
p.185
High Rate Deposition of Thick Oxide Layers on Plastic Substrates
p.189
p.189
Cathodic Arc Evaporation - A Versatile Tool for Thin Film Deposition
p.193
p.193
Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures
p.201
p.201
Novel Three Dimensionally Integrated Thin Film Color Detector for Digital Signal Processing
p.205
p.205
Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon
p.211
p.211
Photoinduced Effects in Thin Amorphous Chalcogenide Films
p.215
p.215
Optimized Amorphous Silicon Based Two-Terminal Thin Film Detectors for Color Recognition
p.221
p.221
Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures
Abstract:
Info:
Periodical:
Materials Science Forum (Volumes 287-288)
Main Theme:
Edited by:
Horst Hoffmann
Pages:
201-204
DOI:
10.4028/www.scientific.net/MSF.287-288.201
Citation:
T. Golnas and F.B. Prinz, "Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures", Materials Science Forum, Vols. 287-288, pp. 201-204, 1998
Online since:
August 1998
Authors:
Price:
$35.00
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