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HomeMaterials Science ForumTrends and New Applications of Thin FilmsThin Film Thermo-Mechanical Sensors Embedded in...

Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures

Abstract:

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Periodical:

Materials Science Forum (Volumes 287-288)

Main Theme:

Trends and New Applications of Thin Films

Edited by:

Horst Hoffmann

Pages:

201-204

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.201

Citation:

T. Golnas and F.B. Prinz, "Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures", Materials Science Forum, Vols. 287-288, pp. 201-204, 1998

Online since:

August 1998

Authors:

T. Golnas, F.B. Prinz

Keywords:

Embedded Sensors, Layered Manufacturing (LM), Reactive Sputtering, Thin Film Sensors

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$41.00

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