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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Fabrication of Micro- and Nanostructures

Fabrication of Micro- and Nanostructures

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Trends and New Applications of Thin Films

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

119-130

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.119

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Online since:

August 1998

Authors:

R. Kassing

Keywords:

Fabrication, Microstructure, Nanostructure

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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