Preface
Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry
p.3
p.3
Crystallography and Microstructure of Thin Films Studied by X-Ray and Electron Diffraction
p.23
p.23
Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques
p.61
p.61
The Manufacture of Thin Film Transistors and Color Filters for Flat Liquid Crystal Displays
p.87
p.87
Doping Diamonds and Diamond Films for Electronic Applications
p.97
p.97
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
p.107
p.107
Fabrication of Micro- and Nanostructures
p.119
p.119
Modelling of PVC Processes
p.131
p.131
Preface
Abstract:
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Info:
Periodical:
Materials Science Forum (Volumes 287-288)
Online since:
August 1998
Сopyright:
© 1998 Trans Tech Publications Ltd. All Rights Reserved
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