Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

3-22

DOI:

10.4028/www.scientific.net/MSF.287-288.3

Citation:

P. Awakowicz "Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry", Materials Science Forum, Vols. 287-288, pp. 3-22, 1998

Online since:

August 1998

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