Paper Titles

Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry
p.3

Crystallography and Microstructure of Thin Films Studied by X-Ray and Electron Diffraction
p.23

Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques
p.61

The Manufacture of Thin Film Transistors and Color Filters for Flat Liquid Crystal Displays
p.87

Doping Diamonds and Diamond Films for Electronic Applications
p.97

Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
p.107

Fabrication of Micro- and Nanostructures
p.119

Modelling of PVC Processes
p.131

HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Diagnostics in Reactive Plasmas with Optical...

Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry

Article Preview

Abstract:

You might also be interested in these eBooks

Trends and New Applications of Thin Films

Info:

Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

3-22

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.3

Citation:

Cite this paper

Online since:

August 1998

Authors:

P. Awakowicz

Keywords:

Diagnostics, Energy-Mass Spectrometry, Optical Emission Spectroscopy, Probe Measurements

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1998 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: