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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288

Materials Science Forum Vols. 287-288

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288

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Paper Title Page

Spectroellipsometric Method for Process Monitoring of Semiconductor Thin Films and Interfaces

Authors: R. Brenot, Morten Kildemo, B. Drévillon

151

Giant Magnetoresistive Sensors for Industrial Applications

Authors: J. Wecker, W. Clemens, E. Hufgard

159

Bioactive Films

Authors: A. Hengerer, E. Prohaska, J. Decker, S. Hauck, E. Yacoub, S. Kößlinger, U. Reischl, S. Drost, Herbert Wolf

169

In-Situ Control of Stoichiometry in Room Temperature MBE-Growth of ZrO₂ Thin Films Using a Novel Hyperthermal Oxygen Atom Source

Authors: E. Wisotzki, Horst Hahn, G.B. Hoflund

181

Surface Analysis of Hard Coatings Deposited by Modified Pulse Arc Process

Authors: K. Keutel, H. Fuchs, Ch. Edelmann, H. Mecke

185

High Rate Deposition of Thick Oxide Layers on Plastic Substrates

Authors: H. Morgner, M. Neumann, M. Krug, S. Straach

189

Cathodic Arc Evaporation - A Versatile Tool for Thin Film Deposition

Authors: F. Richter, G. Krannich, M. Kühn, S. Peter, Ch. Spaeth

193

Thin Film Thermo-Mechanical Sensors Embedded in Metallic Structures

Authors: T. Golnas, F.B. Prinz

201

Novel Three Dimensionally Integrated Thin Film Color Detector for Digital Signal Processing

Authors: D. Knipp, H. Stiebig, O. Kluth, H. Wagner

205

Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon

Authors: R. Krawietz, W. Pompe, A. Gerbatsch, V. Sergo, L.C. Ciacchi

211

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