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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288

Materials Science Forum Vols. 287-288

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288

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Table of Contents

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Paper Title Page

Photoinduced Effects in Thin Amorphous Chalcogenide Films

Authors: K. Petkov

215

Optimized Amorphous Silicon Based Two-Terminal Thin Film Detectors for Color Recognition

Authors: J. Zimmer, D. Knipp, H. Stiebig, H. Wagner

221

Material-Selective Planarization of Oxide Layers: A Novel Technology

Authors: Th. Detzel, P. Hanesch

227

Depth Profiling of Thin TiSi_x-Films on Silicon Carbide by SNMS

Authors: R. Getto, J. Freytag, M. Kopnarski, H. Oechsner

231

Flowfill-Process as a New Concept for Inter-Metal-Dielectrics

Authors: U. Höckele, W. Kröninger, G. Pfeiffer, M.M. Frank, J. Marktanner, K. Beekmann

235

Copper Metallization of Submicron Trenches with Pulsed Vacuum Arc

Authors: P. Siemroth, P. Wenzel, Th. Witke, Bernd Schultrich

239

High Resolution TEM Investigations of Nanostructures in Hard Amorphous Carbon Films

Authors: H. Banzhof, K. Brand, H. Lichte, A. Luft, F.-C. Meyer, H.-J. Scheibe, Bernd Schultrich, H. Ziegele

243

Properties of Si₃N₄-Layers Deposited by Medium Frequency Twin Magnetron Sputtering

Authors: M. Ruske, G. Bräuer, J. Pistner, J. Szczyrbowski, A. Zmelty

247

On the Initial Cubic Phase Nucleation in Boron Nitride Films

Authors: J. Ye, H. Oechsner

251

Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation

Authors: L. Dumas, J.-Y. Robic, Yves Pauleau

255

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