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HomeMaterials Science ForumMaterials Science Forum Vols. 289-292Electrochemical Behaviour of AIN Films Prepared by...

Electrochemical Behaviour of AIN Films Prepared by Reactive Cathodic Sputtering

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Electrochemical Methods in Corrosion Research VI

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Periodical:

Materials Science Forum (Volumes 289-292)

Pages:

689-698

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.289-292.689

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Online since:

August 1998

Authors:

F. Vacandio, Y. Massiani, P. Gravier, L. Fedrizzi, D. Brida

Keywords:

Aluminum Nitride (AlN), Coating, Corrosion, Porosity, Sputtering

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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