Electrochemical Behaviour of AIN Films Prepared by Reactive Cathodic Sputtering

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Periodical:

Materials Science Forum (Volumes 289-292)

Edited by:

Pier Luigi Bonora and Flavio Deflorian

Pages:

689-698

DOI:

10.4028/www.scientific.net/MSF.289-292.689

Citation:

F. Vacandio et al., "Electrochemical Behaviour of AIN Films Prepared by Reactive Cathodic Sputtering", Materials Science Forum, Vols. 289-292, pp. 689-698, 1998

Online since:

August 1998

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$35.00

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