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HomeMaterials Science ForumMaterials Science Forum Vols. 321-324Temperature and Time Resolved Studies of the...

Temperature and Time Resolved Studies of the Titanium Silicide Formatin with GIXRD abd GIXR

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Periodical:

Materials Science Forum (Volumes 321-324)

Pages:

392-399

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.321-324.392

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Online since:

January 2000

Authors:

L. Fischer, J. Klimke, Harm Wulff

Keywords:

In Situ Grazing Incidence X-Ray Diffractometry GIXRD, In Situ Grazing Incidence X-Ray Reflectometry GIXR, Thin Film, Titanium (Ti), Titaniumsilicide

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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