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HomeMaterials Science ForumMaterials Science Forum Vols. 321-324Characterization of Plasma Treated Al-Films by...

Characterization of Plasma Treated Al-Films by GIXR and GIXRD

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Periodical:

Materials Science Forum (Volumes 321-324)

Pages:

406-410

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.321-324.406

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Online since:

January 2000

Authors:

Antje Quade, Harm Wulff

Keywords:

Aluminum (Al), Grazing Incidence X-Ray Diffractometry (GI-XRD), Grazing Incidence X-Ray Reflectometry (GIXR), Plasma Oxidation

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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