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HomeMaterials Science ForumMaterials Science Forum Vols. 347-349In Situ Measurement of Stress during Deposition of...

In Situ Measurement of Stress during Deposition of Boron Nitride Films

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Residual Stress ECRS 5

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Periodical:

Materials Science Forum (Volumes 347-349)

Pages:

156-160

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.347-349.156

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Online since:

May 2000

Authors:

W. Fukarek, C. Fitz, Andreas Kolitsch, W. Möller

Keywords:

Boron Nitride, Ellipsometry, Instantaneous Stress, Ion Implantation, Laser Deflection

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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