Silicon Films Produced by PECVD under Powder Formation Conditions

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Periodical:

Edited by:

R. Martins, I. Ferreira, E. Fortunato and G. Kroesen

Pages:

21-30

DOI:

10.4028/www.scientific.net/MSF.382.21

Citation:

R. Martins et al., "Silicon Films Produced by PECVD under Powder Formation Conditions", Materials Science Forum, Vol. 382, pp. 21-30, 2001

Online since:

November 2001

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$35.00

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