Silicon Films Produced by PECVD under Powder Formation Conditions

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Edited by:

R. Martins, I. Ferreira, E. Fortunato and G. Kroesen

Pages:

21-30

Citation:

R. Martins et al., "Silicon Films Produced by PECVD under Powder Formation Conditions", Materials Science Forum, Vol. 382, pp. 21-30, 2001

Online since:

November 2001

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$38.00

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