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HomeMaterials Science ForumMaterials Science Forum Vol. 382Silicon Films Produced by PECVD under Powder...

Silicon Films Produced by PECVD under Powder Formation Conditions

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Plasma Processing and Dusty Particles

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Periodical:

Materials Science Forum (Volume 382)

Pages:

21-30

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.382.21

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Online since:

November 2001

Authors:

Rodrigo Martins, Hugo Águas, V. Silva, Isabel Ferreira, A. Cabrita, Elvira Fortunato

Keywords:

Material, Plasma Processing

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Сopyright:

© 2001 Trans Tech Publications Ltd. All Rights Reserved

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