Radio Frequency Discharge with Dust Particles

Chutov, Yu.I.; Goedheer, W.J.; Kravchenko, O.Yu.; Zuz, V.M.; Yan, M.

doi:10.4028/www.scientific.net/MSF.382.69

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Radio Frequency Discharge with Dust Particles

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Periodical

Materials Science Forum (Volume 382)

Main Theme

Plasma Processing and Dusty Particles

Edited by

R. Martins, I. Ferreira, E. Fortunato and G. Kroesen

Pages

69-0

DOI

10.4028/www.scientific.net/MSF.382.69

Citation

Y.I. Chutov, W.J. Goedheer, O.Y. Kravchenko, V.M. Zuz, M. Yan, "Radio Frequency Discharge with Dust Particles", Materials Science Forum, Vol. 382, pp. 69-0, 2001

Online since

November 2001

Authors

Yu.I. Chutov, W.J. Goedheer, O.Yu. Kravchenko, V.M. Zuz, M. Yan

Keywords

Dusty Plasma, RF Plasma, RF Plasma Simulation

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