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HomeMaterials Science ForumMaterials Science Forum Vols. 408-412Effect of Line Geometries on Textures in Damascene...

Effect of Line Geometries on Textures in Damascene Cu Lines

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Textures of Materials - ICOTOM 13

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Periodical:

Materials Science Forum (Volumes 408-412)

Pages:

1555-1560

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.408-412.1555

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Online since:

August 2002

Authors:

Jong Min Paik, Young Chang Joo

Keywords:

Damascene Cu, Microstructure, Pole Figure, Texture, X-Ray Diffraction (XRD)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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