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HomeMaterials Science ForumMaterials Science Forum Vols. 426-432Molecular Dynamic Simulation of AFM-Based Nano...

Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components

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THERMEC'2003

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Periodical:

Materials Science Forum (Volumes 426-432)

Pages:

2243-2248

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.426-432.2243

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Online since:

August 2003

Authors:

Young Suk Kim, Seong Ho Yang, Chan Il Kim, Seoung Soo Lee

Keywords:

Atomic Force Microscope (AFM), Micro-Electromechanical System (MEMS), Molecular Dynamic Simulation, Morse Potential, Nanolithography

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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