Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components

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Periodical:

Materials Science Forum (Volumes 426-432)

Main Theme:

Edited by:

T. Candra, Jose Maria Torralba and T. Sakai

Pages:

2243-2248

DOI:

10.4028/www.scientific.net/MSF.426-432.2243

Citation:

Y. S. Kim et al., "Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components", Materials Science Forum, Vols. 426-432, pp. 2243-2248, 2003

Online since:

August 2003

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