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HomeMaterials Science ForumMaterials Science Forum Vols. 437-438Oxide and Nitride Thin Films: Processing and...

Oxide and Nitride Thin Films: Processing and Characterization

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Advanced Materials Processing II

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Periodical:

Materials Science Forum (Volumes 437-438)

Pages:

193-194

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.437-438.193

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Online since:

October 2003

Authors:

Haydn Chen

Keywords:

Thin Film Characterization, Thin Film Processing, Thin Nitride Films, Thin Oxide Films

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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