Precision Thickness Measurement of Ultra-Thin Films via XPS

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 437-438)

Edited by:

M.O. Lai and L. Lu

Pages:

195-198

DOI:

10.4028/www.scientific.net/MSF.437-438.195

Citation:

S. J. Geng et al., "Precision Thickness Measurement of Ultra-Thin Films via XPS", Materials Science Forum, Vols. 437-438, pp. 195-198, 2003

Online since:

October 2003

Export:

Price:

$35.00

In order to see related information, you need to Login.