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HomeMaterials Science ForumMaterials Science Forum Vols. 437-438Precision Thickness Measurement of Ultra-Thin...

Precision Thickness Measurement of Ultra-Thin Films via XPS

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Advanced Materials Processing II

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Periodical:

Materials Science Forum (Volumes 437-438)

Pages:

195-198

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.437-438.195

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Online since:

October 2003

Authors:

Shu Jiang Geng, Sam Zhang, H. Onishi

Keywords:

Application, ESCA, Thickness Measurement, Ultra-Thin Film, X-Ray Photoelectron Spectroscopy (XPS)

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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