Precision Thickness Measurement of Ultra-Thin Films via XPS

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Periodical:

Materials Science Forum (Volumes 437-438)

Edited by:

M.O. Lai and L. Lu

Pages:

195-198

Citation:

S. J. Geng et al., "Precision Thickness Measurement of Ultra-Thin Films via XPS", Materials Science Forum, Vols. 437-438, pp. 195-198, 2003

Online since:

October 2003

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Price:

$38.00

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