TEM and TEM-EDX Analysis of Cross-Section of Anti-Reflective Thin Film and Glass Substrate
Two-layer antireflective films were prepared on Na-Mg-Ca-Si glass substrate by sol-gel process starting from metal alkoxides: Si(OC2H5)4, Ti(OC4H9)4. The transmittance of glass was increased obviously (>95%), the reflective index was reduced to 1.95 through visible light range. TEM observation showed that SiO2 film is compactly joined to TiO2 film and TiO2 film to the substrate. TEM-EDX analysis of the films, film-substrate interface and substrate revealed that with the increase of Ti content, the content of Mg，Ca and Si decreases, however, the content of Na increases. The diffuse of Na+ from the substrate to the film is negative diffusion.
Z.Y. Zhong, H. Saka, T.H. Kim, E.A. Holm, Y.F. Han and X.S. Xie
X. G. Yu et al., "TEM and TEM-EDX Analysis of Cross-Section of Anti-Reflective Thin Film and Glass Substrate", Materials Science Forum, Vols. 475-479, pp. 1579-1582, 2005