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Surface Cleaning Effects of Silicon Substrates by ECR Hydrogen Plasma on Subsequent Homoepitaxial Growth

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Abstract:

We have demonstrated the preparation of the almost defect-free homoepitaxial layer and the defective layer, respectively, with and without applying the in-situ cleaning of the silicon substrate surface using electron cyclotron resonance hydrogen plasma. Secondary ion mass spectroscopy indicated that the interfacial oxygen and carbon concentrations, respectively, decreased and increased with the in-situ cleaning. We have investigated the effect of process parameters such as microwave power, d.c bias, and cleaning time, on the epitaxial growth, by evaluating the cross-sectional transmission electron microscopy images of the subsequently deposited Si homoepitaxial film.

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Periodical:

Materials Science Forum (Volumes 475-479)

Pages:

4067-4070

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.475-479.4067

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Online since:

January 2005

Authors:

Hyoun Woo Kim

Keywords:

Cleaning, Hydrogen Plasma, Si Epitaxial Growth

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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