Electron Beam-Induced Nano-Deposition Using a Transmission Electron Microscope

Masayuki Shimojo; Kazutaka Mitsuishi; M. Tanaka; M. Song; Kazuo Furuya

doi:10.4028/www.scientific.net/MSF.480-481.129

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HomeMaterials Science ForumMaterials Science Forum Vols. 480-481Electron Beam-Induced Nano-Deposition Using a...

Electron Beam-Induced Nano-Deposition Using a Transmission Electron Microscope

Abstract:

Nanometre-sized structures were fabricated by electron beam-induced deposition in a scanning transmission electron microscope. A small amount of metal-organic gases, W(CO)6 and dimethyl acetylacetonato gold, were introduced near a substrate in the chamber of the microscope. The gas was decomposed by the irradiation of focused electron beams and nanometre-sized deposits containing W or Au were produced. Moving the beam position enables us to produce structures with a variety of shapes. High-resolution electron microscopy observation revealed that the structures consisted of nano-crystalline and amorphous parts.

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Materials Science Forum (Volumes 480-481)

Pages:

129-132

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.480-481.129

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Online since:

March 2005

Authors:

Masayuki Shimojo, Kazutaka Mitsuishi, M. Tanaka, M. Song, Kazuo Furuya

Keywords:

Deposition, Electron-Beam, Metal-Organic Gas, Nanofabrication, Structure

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References

[1] S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda and Y. Haruyama: J. Vac. Sci. Technol. B, vol. 18 (2000), p.3181.

DOI: 10.1116/1.1319689

Google Scholar

[2] D. K. Stewart, J. A. Morgan and B. Ward: J. Vac. Sci. Technol. B, vol. 9 (1991), p.2670.

Google Scholar

[3] I. Utke, P. Hoffmann, B. Dwir, K. Leifer, E. Kapon and P. Doppelt: J. Vac. Sci. Technol. B, vol. 18 (2000), p.3168.

DOI: 10.1116/1.1319690

Google Scholar

[4] K. T. Kohlmann-von Platen, J. Chiebek, M. Weiss, K. Reimer, H. Oertel and W. H. Brunger: J. Vac. Sci. Technol. B, vol. 11 (1993), p.2219.

Google Scholar

[5] H. W. P. Koops, C. Schossler, A. Kaya and M. Weber: J. Vac. Sci. Technol. B, vol. 14 (1996), p.4105.

Google Scholar

[6] K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, M. Song and K. Furuya: Appl. Phys. Lett., vol. 83 (2003), p. (2064).

Google Scholar

[7] M. Shimojo, K. Mitsuishi, A. Tameike and K. Furuya: submitted to J. Vac. Sci. Technol. B.

Google Scholar

[8] M. Han, K. Mitsuishi, M. Shimojo and K. Furuya: submitted to Phil. Mag.

Google Scholar

[9] Y. Wu, M. Takeguchi, Q. Chen and K. Furuya: Appl. Surf. Sci. vol. 159-160 (2000), p.486.

Google Scholar

[10] H. W. P. Koops, A. Kaya and M. Weber: J. Vac. Sci. Technol. B, vol. 13 (1995), p.2400. Fig. 4 High resolution image of a nano wire produced using W(CO)6 gas. Fig. 5 High resolution image of a nano wire produced using Me2Au(Acac) gas.

Google Scholar