Electron Beam-Induced Nano-Deposition Using a Transmission Electron Microscope

Abstract:

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Nanometre-sized structures were fabricated by electron beam-induced deposition in a scanning transmission electron microscope. A small amount of metal-organic gases, W(CO)6 and dimethyl acetylacetonato gold, were introduced near a substrate in the chamber of the microscope. The gas was decomposed by the irradiation of focused electron beams and nanometre-sized deposits containing W or Au were produced. Moving the beam position enables us to produce structures with a variety of shapes. High-resolution electron microscopy observation revealed that the structures consisted of nano-crystalline and amorphous parts.

Info:

Periodical:

Materials Science Forum (Volumes 480-481)

Edited by:

A. Méndez-Vilas

Pages:

129-132

DOI:

10.4028/www.scientific.net/MSF.480-481.129

Citation:

M. Shimojo et al., "Electron Beam-Induced Nano-Deposition Using a Transmission Electron Microscope", Materials Science Forum, Vols. 480-481, pp. 129-132, 2005

Online since:

March 2005

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Price:

$35.00

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