Fabrication of Rolling Mold for a 200μm Microlens Array by 3D LIGA-Like Processes
This paper presents a series of three dimensional (3D) LIGA-like processes to fabricate microlens arrays on a cylindrical substrate. The processes consist of design of mask and rotating mechanism, coating of photoresist, 3D UV lithography, development and hardening, and electroforming. It transfers microlens array pattern to a φ76mm cylindrical stainless steel substrate intended for use as a rolling mold via electroforming. Process technologies are investigated and experiments are design and conducted as a proof of concept. Experimental results showed that φ200μm microlens arrays can be fabricated on the substrate with good repeatability. The microlens pattern transferred to the 100μm-thick film showed the feasibility and stability of the 3D lithography process.
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
J. C. Tsai et al., "Fabrication of Rolling Mold for a 200μm Microlens Array by 3D LIGA-Like Processes", Materials Science Forum, Vols. 505-507, pp. 271-276, 2006