Fabrication of Rolling Mold for a 200μm Microlens Array by 3D LIGA-Like Processes

Abstract:

This paper presents a series of three dimensional (3D) LIGA-like processes to fabricate microlens arrays on a cylindrical substrate. The processes consist of design of mask and rotating mechanism, coating of photoresist, 3D UV lithography, development and hardening, and electroforming. It transfers microlens array pattern to a φ76mm cylindrical stainless steel substrate intended for use as a rolling mold via electroforming. Process technologies are investigated and experiments are design and conducted as a proof of concept. Experimental results showed that φ200μm microlens arrays can be fabricated on the substrate with good repeatability. The microlens pattern transferred to the 100μm-thick film showed the feasibility and stability of the 3D lithography process.

• Periodical: Materials Science Forum (Volumes 505-507)
• Pages: 271-276
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.505-507.271
• Online since: January 2006
• Authors: Jhy Cherng Tsai, Ken Liu, Hsi Harng Yang
• Keywords: 3D LIGA-Like Processes, Micro-Lens Array, Repeatability

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