Nanosecond Time Resolution In Situ Optical Reflection and Transmission Measurements during XeF Excimer Laser Interaction with Amorphous Silicon Thin Films

Abstract:

XeF excimer laser-induced melting and recrystallization of amorphous silicon was studied using in-situ online time-resolved reflection and transmission measurements with a nanosecond time resolution. The explosive crystallization was observed for 50nm thick amorphous silicon on SiO2 deposited on non-alkali glass substrate upon 25ns pulse duration of excimer laser. Three distinct regrowth regimes were found using various excimer laser fluences. Scanning electron microscopy, Raman spectroscopy and atomic force microscopy were used to evaluate the excimer laser- irradiated region of the sample. Grain size, surface roughness and melt duration as a function of different laser fluences are also determined.

• Periodical: Materials Science Forum (Volumes 505-507)
• Pages: 337-342
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.505-507.337
• Online since: January 2006
• Authors: Chil Chyuan Kuo, W.C. Yeh, C.B. Chen, Jeng Ywan Jeng
• Keywords: Crystallization Mechanism, Excimer Laser Crystallization, Explosive Crystallization, In Situ Optical Reflection, Transmission Measurement

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