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HomeMaterials Science ForumMaterials Science Forum Vols. 505-507Abbe Error-Free Test Equipment for Nanometer-Order...

Abbe Error-Free Test Equipment for Nanometer-Order Measurements

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Progress on Advanced Manufacture for Micro/Nano Technology 2005

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Periodical:

Materials Science Forum (Volumes 505-507)

Pages:

379-384

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.505-507.379

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Online since:

January 2006

Authors:

Yung Cheng Wang, E. Manske, Gerd Jäger, Wen Yuh Jywe

Keywords:

Abbe Error-Free, Angle Control, Laser Interferometer, Nano Gauging Displacement Transducers

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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