The Effects of Si Addition to the Tin Oxide Thin Films on the Electrochemical Characteristics for Lithium Secondary Microbattery Anode

Abstract:

For lithium secondary microbattery anode, the tin oxide thin films with the various Si additions (0, 2, 6, 10, 20mol%) were prepared on the p-type (100) SiO2/Si substrate by R.F. magnetron sputtering method at the substrate temperature of 300°C under the gas ratio of Ar/O2 (7/3). The effect of Si addition to the SnO2 thin film on the structural change and electrochemical performance and the reversible capacity performance was investigated. As Si addition amounts increased, Si-O bonding density increased and Sn-O bonding density decreased. The addition of optimum Si amount led decrease of Sn oxidation state so that the irreversible capacity was reduced and cycle characteristic was enhanced during the charge-discharge test. SnO2 films with 6mol%Si had the highest reversible capacity of 700mAh/g after 100cycles.

• Periodical: Materials Science Forum (Volumes 510-511)
• Pages: 1130-1133
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.510-511.1130
• Online since: March 2006
• Authors: Chul Ho Park, Young Gook Son
• Keywords: RF Magnetron Sputtering, Secondary Lithium Battery, SnO₂

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