Colloidal silica/silane sol solutions were prepared in variation with the ratio of silane to colloidal silica. Such sol solutions were synthesized from colloidal silica/tetramethoxysilane (TMOS)/methyltrimethoxysilane(MTMS). Sol solutions were prepared by sol-gel reaction through two step reactions. To understand their physical and chemical properties, dip coating of sol solutions was performed on the glass substrates. Contact angle and thickness of coating films increased with increasing the amount of MTMS. The surface free energy of coating films decreased with increasing amount of MTMS. Coating films were stable until 550°C. Thermal degradation temperature of coating films decreased with increasing amount of MTMS. Plastic hardness decreased with increasing amount of MTMS. Elastic portion increased with increasing amount of MTMS.