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HomeMaterials Science ForumMaterials Science Forum Vols. 532-533An Analytical Model for Electrically Actuated...

An Analytical Model for Electrically Actuated Scanning Probe in Electrostatic Force Microscopy

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Advances in Materials Manufacturing Science and Technology II

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Periodical:

Materials Science Forum (Volumes 532-533)

Pages:

161-164

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.532-533.161

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Online since:

December 2006

Authors:

Hong Xi Wang, Jian Zhao, Jian Yuan Jia

Keywords:

Electrostatic Force, Electrostatic Force Microscopy, Microprobe, Tip

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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