An Investigation of Form Compensation in Fabricating Microlens Arrays by Ultra-Precision Fast-Tool-Servo Technology

Abstract:

Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system – SOP. The form error was successfully reduced after implementation of tool compensation.

• Periodical: Materials Science Forum (Volumes 532-533)
• Pages: 689-692
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.532-533.689
• Online since: December 2006
• Authors: Tsz Chun Kwok, Suet To, Chi Fai Cheung, Su Juan Wang, Wing Bun Lee
• Keywords: Fast Tool Servo (FTS), Form Accuracy, Micro-Lens Array, Optimal Cutting Conditions, Surface Roughness (SR), Tool Compensation, Ultra-Precision Machining

References

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[4] C.F. Cheung and W.B. Lee: Surface Generation in Ultra-precision Diamond Turning: Modeling and Practices (Professional Engineering, 2003). Fig. 6 Form accuracy (Rt) of absolutely radius after tool compensation Fig. 5 The least square radius before tool compensation.