An Investigation of Form Compensation in Fabricating Microlens Arrays by Ultra-Precision Fast-Tool-Servo Technology
Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system – SOP. The form error was successfully reduced after implementation of tool compensation.
Chengyu Jiang, Geng Liu, Dinghua Zhang and Xipeng Xu
T. C. Kwok et al., "An Investigation of Form Compensation in Fabricating Microlens Arrays by Ultra-Precision Fast-Tool-Servo Technology", Materials Science Forum, Vols. 532-533, pp. 689-692, 2006