Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing

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This paper describes novel MEMS probe card device, which is composed of silicon (Si) cantilever beams actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. Since Ti-Ni SMA film can yield a higher work output per unit volume, Ti-Ni film-actuated Si cantilever beam is expected to be a MEMS probe card device providing large contact force between probe and electrode pad. The developed cantilever beam produces a contact force by not only cantilever bending in contact but also the shape memory effect (SME) of Ti-Ni film arising from Joule’s heating. The SME of Ti-Ni film containing Ti of 50.5 atomic (at.) % to 53.2 at. % can generate an additional contact force of 200 μN on average under applying an electric power of 500 mW to the film. Ti-Ni film-actuated Si cantilever beam would be a key element for successful MEMS probe card with larger contact force and smaller size.

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Periodical:

Materials Science Forum (Volumes 539-543)

Main Theme:

Edited by:

T. Chandra, K. Tsuzaki, M. Militzer , C. Ravindran

Pages:

3213-3218

Citation:

T. Namazu et al., "Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing", Materials Science Forum, Vols. 539-543, pp. 3213-3218, 2007

Online since:

March 2007

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$38.00

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