Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing

Abstract:

This paper describes novel MEMS probe card device, which is composed of silicon (Si) cantilever beams actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. Since Ti-Ni SMA film can yield a higher work output per unit volume, Ti-Ni film-actuated Si cantilever beam is expected to be a MEMS probe card device providing large contact force between probe and electrode pad. The developed cantilever beam produces a contact force by not only cantilever bending in contact but also the shape memory effect (SME) of Ti-Ni film arising from Joule’s heating. The SME of Ti-Ni film containing Ti of 50.5 atomic (at.) % to 53.2 at. % can generate an additional contact force of 200 μN on average under applying an electric power of 500 mW to the film. Ti-Ni film-actuated Si cantilever beam would be a key element for successful MEMS probe card with larger contact force and smaller size.

• Periodical: Materials Science Forum (Volumes 539-543)
• Pages: 3213-3218
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.539-543.3213
• Online since: March 2007
• Authors: Takahiro Namazu, Y. Okamura, Y. Tashiro, Shozo Inoue
• Keywords: Actuator, Contact Force, Contact Resistance, Micro-Electromechanical System (MEMS), Probe Card, Shape Memory Alloy Actuator, Sputtering, Ti-Ni Film

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