Embossing on Epoxy Thermoset Polymer Using SiO2 Coated Nickel Template

Kyeong Jae Byeon; Sung Hoon Hong; Ki Yeon Yang; Deok Kee Kim; Heon Lee

doi:10.4028/www.scientific.net/MSF.539-543.3580

Paper Titles

Effect of DC Bias Voltage on the Optical Properties of TiO₂ Thin Film Deposited by Plasma Assisted Electron Beam Evaporation
p.3557

Fabrication of Sputtered TiO_2-XN_X Photocatalyst Using Spark Plasma Sintered Targets
p.3562

In Situ Scanning Electron Microscopy Observation of the Pattern Formation on the Surface of Al/Ge Bilayer Films
p.3568

Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition
p.3574

Embossing on Epoxy Thermoset Polymer Using SiO₂ Coated Nickel Template
p.3580

Microstructure and Texture in an Alpha/Beta Titanium Alloy and their Impact on Mechanical Response
p.3589

Ageing of C-Containing and C-Free Ti-15Cr and Ti-15-3
p.3595

Melting and Casting of Titanium Alloys
p.3601

Constitutive Analysis of the High-Temperature Deformation Behavior of Single Phase α-Ti and α+β Ti-6Al-4V Alloy
p.3607

HomeMaterials Science ForumMaterials Science Forum Vols. 539-543Embossing on Epoxy Thermoset Polymer Using SiO2...

Embossing on Epoxy Thermoset Polymer Using SiO₂ Coated Nickel Template

Abstract:

Embossing or imprint lithography is the key-technology for the mass production of nanosized structures with low cost. Currently Si or quartz template which is produced by e-beam or DUV lithography and reactive ion etching, is used. However they are very expensive and easily damaged due to their brittleness. On the other hand, Ni template has high mechanical durability and can be fabricated with low cost by electroplating. However, one of the key obstacles of Ni template is poor antistiction property, when it is used with sticky thermoset polymer. Due to its poor antistiction property, detachment of Ni template from epoxy substrate is one of the key obstacles. In this experiment, quartz template with 150nm to 1μm sized surface protrusion was fabricated and used to emboss the PMMA coated Si wafer. Then the imprinted PMMA layer was coated with metal seed layer and electroplating of Ni was followed to fabricate Ni template with 150nm to 1μm sized patterns. In order to form antistiction layer on Ni template, SAM antistiction layer was formed on SiO2 coated Ni template. As a result, nano patterns could be successfully transferred to sticky thermoset polymer using Ni template without any degradation of antistiction property.

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Periodical:

Materials Science Forum (Volumes 539-543)

Pages:

3580-3585

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.539-543.3580

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Online since:

March 2007

Authors:

Kyeong Jae Byeon, Sung Hoon Hong, Ki Yeon Yang, Deok Kee Kim, Heon Lee

Keywords:

Embossing Lithography, Epoxy Resin (ER), Ni Template, SAM Coating, Thermoset Polymer

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