A Comparison of the Mechanical Properties of RF- and DC- Sputter-Deposited Cr Thin Films
Chromium (Cr) films were deposited on plain carbon steel sheets by DC and RF magnetron sputtering as well as by electroplating. Effects of DC or RF sputtering power on the deposition rate and properties such as hardness and surface roughness of the Cr films were investigated. X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microcopy (SEM) analyses were performed to investigate the crystal structure, surface roughness, thickness of the Cr films. The deposition rate, hardness and surface roughness of the Cr film deposited by either DC or RF sputtering increase with the increase of sputtering power. The deposition rate and hardness of the Cr film deposited by DC sputtering are higher than those of the Cr film deposited by RF sputtering, but RF sputtering offers smoother surface. The sputter-deposited Cr film is harder and has a smoother surface than the electroplated one.
Yafang Han et al.
M. W. Park et al., "A Comparison of the Mechanical Properties of RF- and DC- Sputter-Deposited Cr Thin Films", Materials Science Forum, Vols. 546-549, pp. 1695-1698, 2007