High Resolution Imaging by Means of Backscattered Electrons in the Scanning Electron Microscope

Abstract:

This paper deals with imaging by means of backscattered electrons in the high resolution scanning electron microscopy. Possible backscattered electrons detection systems are outlined and one of the most efficient, the high take of angle single crystal scintillation detector, is described in detail. Its advantages and disadvantages are discussed and the comparison with the secondary electron detection modes is shown. The high resolution micrographs taken by the backscattered electron detector as well as by the secondary electron detectors are displayed.

• Periodical: Materials Science Forum (Volumes 567-568)
• Pages: 313-316
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.567-568.313
• Online since: December 2007
• Authors: Petr Wandrol, Jiřina Matějková, Antonín Rek
• Keywords: Backscattered Electrons, Detection, Imaging, Scanning Electron Microscope (SEM)

References

[1] T. E. Everhart and R. F. M Thornley: J. Sci. Instrum. Vol. 37 (1960), pp.246-248.

[2] M. T. Frost, I. R. Harrowfield and M. Zuiderwyk: J. Phys. E: Sci. Instrum. Vol. 14 (1981), pp.597-601.

[3] J. L. Wiza: Nuclear Instruments and Methods Vol. 162 (1979), pp.587-601.

[4] R. Autrata, P. Walther, S. Kriz and M. Müller: Scanning Vol. 8 (1985), pp.3-8.

[5] S. H. Moll, F. Healey, B. Sullivan and W. Johnson: Scanning Electron Microscopy Vol. 1 (1978), pp.303-310.

[6] R. Autrata, R. Hermann and M. Müller: Scanning Vol. 14 (1992), pp.127-135.

[7] R. Autrata, P. Schauer, Ji. Kvapil and Jo. Kvapil: J. Phys. E: Sci. Instrum. Vol. 11 (1978), pp.707-708.

[8] P. Wandrol: submitted to Journal of Microscopy (2007).

[9] M. G. D. Steigerwald: Microscopy Today Vol. 11 (2003), pp.26-28.

[10] Information on http: /www. hitachi-hta. com/pageloader~type~page~id~emd_tech_notes. html.