High Resolution Imaging by Means of Backscattered Electrons in the Scanning Electron Microscope

Abstract:

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This paper deals with imaging by means of backscattered electrons in the high resolution scanning electron microscopy. Possible backscattered electrons detection systems are outlined and one of the most efficient, the high take of angle single crystal scintillation detector, is described in detail. Its advantages and disadvantages are discussed and the comparison with the secondary electron detection modes is shown. The high resolution micrographs taken by the backscattered electron detector as well as by the secondary electron detectors are displayed.

Info:

Periodical:

Materials Science Forum (Volumes 567-568)

Edited by:

Pavel Šandera

Pages:

313-316

DOI:

10.4028/www.scientific.net/MSF.567-568.313

Citation:

P. Wandrol et al., "High Resolution Imaging by Means of Backscattered Electrons in the Scanning Electron Microscope", Materials Science Forum, Vols. 567-568, pp. 313-316, 2008

Online since:

December 2007

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Price:

$35.00

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