Synthesis of Silicon Nitride Using Taguchi Planning Methodology

Katia C.S. Richetto; Cosme Roberto Moreira Silva

doi:10.4028/www.scientific.net/MSF.591-593.760

Paper Titles

Catalytic Evaluation of Al₂O₃-ZrO₂ Supports Used in the Reduction of NO with CH₄
p.740

Morphological and Luminescent Characteristics of ZnO Nanopowders Doped with Europium
p.745

Morphological and Structural Analysis of Alfa-Al₂O₃ Modified with Zr Prepared by Combustion Reaction
p.750

Synthesis of Potassium Titanate Fibers for Friction Materials
p.755

Synthesis of Silicon Nitride Using Taguchi Planning Methodology
p.760

Obtained of Diamond Nanometric Powders Using High Energy Milling for the Production of Alumina-Diamond Nanocomposites
p.766

High Purity Zirconia and Silica Powders via Wet Process: Alkali Fusion of Zircon Sand
p.771

Combustion Synthesis of NiO/YSZ Composite
p.777

Hydrodynamic Characteristics of Free Rise of Light Spheres and Bubbles in Newtonian and Non-Newtonian Liquids
p.785

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Synthesis of Silicon Nitride Using Taguchi Planning Methodology

Abstract:

Silicon Nitride is considered as an important material for use in structural applications. Its performance is severely influenced by modern synthesis processes. In the present work, silicon nitride powder synthesis was performed using liquid silicon tetrachloride and gaseous ammonia, at low temperature and inert atmosphere. Diimide pyrolisis was made on temperature between 1300 and 1500 0C. A Taguchi design of experiments methodology was applied, aiming to obtain powders with appropriated characteristics for structural applications. On pyrolisis, the use of alumina based substrates resulted on SIALON phase formation, probably originated from oxygen reaction, provided from alumina. Silicon carbide substrates and alumina recovered with silicon nitride enhance synthesis of pure silicon nitride powder.