Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver

Chen Hsieh; Cang Chin Yang; Chen Chiu Huang; Chih Hong Chen

doi:10.4028/www.scientific.net/MSF.594.235

Paper Titles

A Study of Cutting Temperatures in Turning of Glass Fiber Reinforced Plastics Materials
p.193

Automation Finish Processes of Sword Surface Using Burnishing Assistance
p.214

The Study of Effects of Cutting Parameters and PVD-Coatings on Tool Life of Micro End Drill by Using Taguchi Method
p.220

Experimental Study on Five-Axis Machining Parameter for NAK80 Die Steel
p.226

Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver
p.235

Formability of the Layer Additive Ceramic Part
p.241

Evaluation of FDM Rapid Prototyping with ABSi Material for Airfoil Design
p.249

Evaluation of Surface Finish Affect on Aerodynamic Coefficients of Wind Tunnel RP Models Production with ABSi Material
p.255

Application of Dynamic Masking on Rapid Prototyping
p.261

HomeMaterials Science ForumMaterials Science Forum Vol. 594Fast Nanometer Positioning of Heavy Loads Using a...

Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver

Abstract:

Current motion tables can hardly exhibit the capabilities of positioning with nanometer precision and carrying heavy loads simultaneously. This is mainly because that the driver used to drive the table cannot fulfill the requirements needed for driving an ultra precision system without sacrificing the power it can offer. In this research, the concept of a hybrid driver is introduced and tested. This driver is basically a combination of a linear amplifier and an on-off large power supply. Although there are still some defects need to be overcome, preliminary experimental tests have shown that this kind of driver does have potential to carry heavy loads to do fast and long distance positioning with nanometer precision and in-position vibration.