Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver
Current motion tables can hardly exhibit the capabilities of positioning with nanometer precision and carrying heavy loads simultaneously. This is mainly because that the driver used to drive the table cannot fulfill the requirements needed for driving an ultra precision system without sacrificing the power it can offer. In this research, the concept of a hybrid driver is introduced and tested. This driver is basically a combination of a linear amplifier and an on-off large power supply. Although there are still some defects need to be overcome, preliminary experimental tests have shown that this kind of driver does have potential to carry heavy loads to do fast and long distance positioning with nanometer precision and in-position vibration.
Sheng-Jye Hwang and Sen-Yung Lee
C. Hsieh et al., "Fast Nanometer Positioning of Heavy Loads Using a Hybrid Driver", Materials Science Forum, Vol. 594, pp. 235-240, 2008