Eliminating Hysteresis Effect of Force Actuator for Profiler Design with Rate Inner Loop Compensation

Abstract:

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The key point of this research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implementation of a surface profiler to reduce the hysteresis effect of the force actuator.

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Periodical:

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Edited by:

Sheng-Jye Hwang and Sen-Yung Lee

Pages:

363-367

DOI:

10.4028/www.scientific.net/MSF.594.363

Citation:

J. M. Lin and P. K. Chang, "Eliminating Hysteresis Effect of Force Actuator for Profiler Design with Rate Inner Loop Compensation", Materials Science Forum, Vol. 594, pp. 363-367, 2008

Online since:

August 2008

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$35.00

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