Eliminating Hysteresis Effect of Force Actuator for Profiler Design with Rate Inner Loop Compensation
The key point of this research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implementation of a surface profiler to reduce the hysteresis effect of the force actuator.
Sheng-Jye Hwang and Sen-Yung Lee
J. M. Lin and P. K. Chang, "Eliminating Hysteresis Effect of Force Actuator for Profiler Design with Rate Inner Loop Compensation", Materials Science Forum, Vol. 594, pp. 363-367, 2008