Electrical Property Characterization of Plasma Sprayed Polycrystalline Silicon

Ya Ran Niu; Xuan Yong Liu; Yi Zeng; Xue Bin Zheng; Heng Ji; Chuan Xian Ding

doi:10.4028/www.scientific.net/MSF.620-622.303

Paper Titles

Effect of Deformation Parameters on Deformation Behavior of Ti14 Alloy during Semi-Solid Compression
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Effect of CaO Addition on High Temperature Tensile Properties of Mg Casting Alloys
p.291

Precipitation Prediction and Experimental Clarification of Mg-Al-Sn System
p.295

Synthesis and Properties of Polyurethane-Based Actuator with Poly(dimethyl Siloxane)
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Electrical Property Characterization of Plasma Sprayed Polycrystalline Silicon
p.303

In Vitro Assessment of Antibacterial Activity and Cytotoxicity of Silver Contained Antibacterial HA Coating Material
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The Effect of Filler on the Properties of Silicone Rubber
p.311

Development of Composite Binder System for Shell Mold in Precision Casting of Thin Stainless Steel
p.315

Improving Contact Damage Resistance of Thermal Barrier Coatings by Incorporating Buffer Layer
p.319

HomeMaterials Science ForumMaterials Science Forum Vols. 620-622Electrical Property Characterization of Plasma...

Electrical Property Characterization of Plasma Sprayed Polycrystalline Silicon

Abstract:

Silicon-based materials have been widely applied in industrial fields, such as microelectronic and solar power, for the specific electronic properties. In the present work, free-standing thick silicon coatings were fabricated by air plasma spraying (APS) and vacuum plasma spraying (VPS) technologies. The microstructure and electrical property of the coatings were characterized. It was found that the electrical resistance of APS-Si coating was higher than that of VPS-Si coating. The impedance spectroscopy results showed there was significant difference in impedance curves of APS-Si and VPS-Si coatings. The grain boundary semicircle appeared in the plot of VPS-Si coating, while did not appeared in that of APS-Si coating. It was thought that the electrical property difference of the two kind coatings was related with the oxidation and microstructure difference of the coatings.