TiO2 thin film was prepared on soda lime glass by hydrolysis of Ti(OC4H9)4 in alcoholic solutions by sol-gel method combined with spin-coating and calcination different temperatures. Prepared samples were characterized by XRD, FESEM, and measurement of contact angles and transmittance. XRD identification reveals that the films are composed of anatase TiO2 when the annealing temperature was set at 450~550 oC. SiO2 layer was coated on the surface of the glass firstly to barrier the diffusing of sodium ions from the substrate. Light-induced superhydrophilicity of the TiO2 thin film has been investigated. To increase the illumination light intensity will decrease the water contact angle. The superhydrophilicity of the TiO2 thin film will disappear more slowly in the dark than that in the field of ultrasound.