A MEMS Capacitive Gyroscope with Improved Reliability

Xin Jian Liang; S.Q. Gao

doi:10.4028/www.scientific.net/MSF.628-629.341

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Study on the Magnetic Abrasive Finishing Based on 5-DOF Machine Tool
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On Reconfigurable Machines and Reconfigurable Assembling Machine for DC Connector Plug
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Study on Cutter Radius Compensation Methods for 5-Axis CNC Machining
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Robust Optimization of an Accelerometer Considering Fabrication Errors
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Development and Experimental Investigation of Micro-Turbine in Millimeter Size
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Investigation of 2-DOF Precision Positioning System for IC Packaging
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HomeMaterials Science ForumMaterials Science Forum Vols. 628-629A MEMS Capacitive Gyroscope with Improved...

A MEMS Capacitive Gyroscope with Improved Reliability

Abstract:

The MEMS capacitive gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of the MEMS gyroscope were presented. In addition, the adhesion failure analysis was illustrated. Finally, a lateral comb structure to improve the reliability of the MEMS gyroscope was presented. Test result indicates that the reliability of the MEMS capacitive gyroscope is improved.

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Advances in Materials Manufacturing Science & Technology XIII Volume II

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Periodical:

Materials Science Forum (Volumes 628-629)

Pages:

341-346

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.628-629.341

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Online since:

August 2009

Authors:

Xin Jian Liang, S.Q. Gao

Keywords:

Adhesion Failure, Lateral Comb Capacitor, MEMS Gyroscope, Reliability

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References

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