Robust Optimization of an Accelerometer Considering Fabrication Errors

Guang Jun Liu; Tao Jiang; An Lin Wang

doi:10.4028/www.scientific.net/MSF.628-629.353

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HomeMaterials Science ForumMaterials Science Forum Vols. 628-629Robust Optimization of an Accelerometer...

Robust Optimization of an Accelerometer Considering Fabrication Errors

Abstract:

A robust optimization approach of an accelerometer is presented to minimize the effect of variations from micro fabrication. The sensitivity analysis technology is employed to reduce design space and to find the key parameters that have greatest influence on the accelerometer. And then, the constraint conditions and objective functions for robust optimization and the corresponding mathematical model are presented. The optimization problem is solved by the Multiple-island Genetic Algorithm and the results show that an accelerometer with better performance is obtained.

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Advances in Materials Manufacturing Science & Technology XIII Volume II

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Periodical:

Materials Science Forum (Volumes 628-629)

Pages:

353-356

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.628-629.353

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Online since:

August 2009

Authors:

Guang Jun Liu, Tao Jiang, An Lin Wang

Keywords:

Accelerometer, Fabrication Error, Robust Optimization, Sensitivity Analysis

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References

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