Robust Optimization of an Accelerometer Considering Fabrication Errors

Abstract:

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A robust optimization approach of an accelerometer is presented to minimize the effect of variations from micro fabrication. The sensitivity analysis technology is employed to reduce design space and to find the key parameters that have greatest influence on the accelerometer. And then, the constraint conditions and objective functions for robust optimization and the corresponding mathematical model are presented. The optimization problem is solved by the Multiple-island Genetic Algorithm and the results show that an accelerometer with better performance is obtained.

Info:

Periodical:

Materials Science Forum (Volumes 628-629)

Edited by:

Dongming Guo, Jun Wang, Zhenyuan Jia, Renke Kang, Hang Gao, and Xuyue Wang

Pages:

353-356

DOI:

10.4028/www.scientific.net/MSF.628-629.353

Citation:

G. J. Liu et al., "Robust Optimization of an Accelerometer Considering Fabrication Errors", Materials Science Forum, Vols. 628-629, pp. 353-356, 2009

Online since:

August 2009

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Price:

$35.00

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