Preparation of Functionally Graded Bio-Ceramic Film by MOCVD

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Functionally graded Ca-Ti-O/Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of each precursors, total pressure (Ptot) and substrate temperature (Tsub). CaTiO3 films in a single phase were obtained at Tsub = 973 and 1073 K. CaTiO3 films prepared at 873 K had a dense and smooth surface, whereas that prepared at Tsub = 1073 K had complicated rough surface with a cauliflower-like texture. The graded texture of CaTiO3 films from columnar to fine grains was advantageous to good adherence for metal substrates. -TCP and HAp films in a single phase were obtained at Tsub = 973 and 1073 K. Both -TCP and HAp films had a dense and smooth surface. The maximum deposition rate of Ca-Ti-O and Ca-P-O films were 44 and 20 m/h, respectively, and several 10 times grater than that of sputtering method. Apatite formation rate strongly depended on the surface morphology of film. Apatite formed after 3 days on the CaTiO3 film, 14 days on the -TCP film and 6 hours on the HAp film in a Hanks’ solution.

Info:

Periodical:

Materials Science Forum (Volumes 631-632)

Edited by:

Akira Kawasaki, Akinaga Kumakawa and Masayuki Niino

Pages:

193-198

DOI:

10.4028/www.scientific.net/MSF.631-632.193

Citation:

M. Sato et al., "Preparation of Functionally Graded Bio-Ceramic Film by MOCVD", Materials Science Forum, Vols. 631-632, pp. 193-198, 2010

Online since:

October 2009

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$35.00

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