Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film
Sputter deposited Fe0.7Co0.3 nitride thin film had zinc blende structure. It was thermally decomposed completely back to the ferromagnetic Fe0.7Co0.3 alloy above 400°C. As-deposited nitride thin films obtained in cosputtering of (Fe0.7Co0.3)1-xAlx composite target with nitrogen sputter gas were solid solutions with zinc blende (x≤0.44) and wurtzite (x>0.5) type structure, respectively. The largest magneto resistance ratio of 0.24% was observed on the Fe0.7Co0.3 alloy particles dispersed in AlN thin film obtained by thermal decomposition of the nitride solid solution with x=0.66 at 500°C.
Akira Kawasaki, Akinaga Kumakawa and Masayuki Niino
K. Sakon et al., "Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film", Materials Science Forum, Vols. 631-632, pp. 327-331, 2010