Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film

K. Sakon; Y. Hirokawa; Yasuji Masubuchi; Shinichi Kikkawa

doi:10.4028/www.scientific.net/MSF.631-632.327

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HomeMaterials Science ForumMaterials Science Forum Vols. 631-632Sputter Deposition of Fe-Co Nitride for...

Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film

Abstract:

Sputter deposited Fe0.7Co0.3 nitride thin film had zinc blende structure. It was thermally decomposed completely back to the ferromagnetic Fe0.7Co0.3 alloy above 400°C. As-deposited nitride thin films obtained in cosputtering of (Fe0.7Co0.3)1-xAlx composite target with nitrogen sputter gas were solid solutions with zinc blende (x≤0.44) and wurtzite (x>0.5) type structure, respectively. The largest magneto resistance ratio of 0.24% was observed on the Fe0.7Co0.3 alloy particles dispersed in AlN thin film obtained by thermal decomposition of the nitride solid solution with x=0.66 at 500°C.

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Materials Science Forum (Volumes 631-632)

Pages:

327-331

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.631-632.327

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Online since:

October 2009

Authors:

K. Sakon, Y. Hirokawa, Yasuji Masubuchi, Shinichi Kikkawa

Keywords:

Granular Film, Magnetoresistivity MR, Nitride, Sputter Deposition, Thermal Decomposition

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