Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering

Abstract:

The Al-doped ZnO (AZO) films were deposited on the glass substrates by RF magnetron sputtering at different substrate temperatures. The effect of substrate temperature on the structural, optical, and electrical properties of AZO films was investigated. The results indicate each of the films has a preferential c-axis orientation. The grain size increases with substrate temperature increasing. All the films exhibit a high transmittance in visible region and have sharp ultraviolet absorption characteristics. The resistivity decreases with substrate temperature increasing up to 250oC, then increases for higher temperature.

• Periodical: Materials Science Forum (Volumes 663-665)
• Pages: 1293-1297
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.663-665.1293
• Online since: November 2010
• Authors: Yue Bo Wu, Sheng Lei, Zhe Wang, Ru Hai Zhao, Lei Huang, Hui Li
• Keywords: AZO Film, Resistivity, Substrate Temperature, Transmittance

References

[1] U. Özgür, Y. I. Alivov and C. Liu, et al.: J. Appl. Phy. Vol. 98 (2005), p.041301.

[2] C. -Q. Ge, A. Y. Guo and X. –F. Hu: J. Appl. Opt. Vol. 27 (2006), p.40.

[3] S. Kim, H. Kim and T. Seong: J. Appl. Phy. Lett. Vol. 86 (2005), p.112101.

[4] R. L. Hoffman: J. Appl. Phy. Vol. 95 (2004), p.5813.

[5] C. Guillén and J. Herrero: J. Thin Solid Films Vol. 515 (2006), p.6403.

[6] D. -M. Wang, J. Lu, C. -Q. Chen et al.: J. Physical Testing and Chemical Analysis Vol. 42 (2006), p.19.

[7] Z. –W. Li and W. Gao. J. Materials Letters Vol. 58 (2004), p.1363.

[8] G. Kiriakidis, M. Suchea, S. Christoulakis et al.: J. Thin Solid Films Vol. 515 (2007), p.8577.

DOI: 10.1016/j.tsf.2007.03.111

[9] S. N. Bai and T. Y. Tseng: J. Thin Solid Films Vol. 515 (2006), p.872.

[10] R. Ondo-Ndong, G. Ferblantier, M. Al Kalfioui et al.: J. Crys. Grow. Vol. 255 (2003), p.130.

[11] A. El-Yadouni, A. Boudrioua, J. C. Loulergue et al. : J. Optical Materials Vol. 27 (2005), p.1391.

[12] S. M. Rozati and S. Akesteh: J. Materials Characterization, Vol. 58 (2007), p.319.

[13] J. -F. Yan, Y. -M. Lu, H. -W. Liang et al.: J. Crys. Grow. Vol. 280 (2005), p.206.

[14] Y. -D. Liu, J. -S. Lian. J. Appl. Sur. Sci. Vol. 253 (2007), p.3727.

[15] Z. Q. Xu, H. Deng, Y. Li et al.: J. Mate. Res. Bul. Vol. 41 (2006), p.3548.

[16] L. Li, L. Fang, X. -M. Chen et al.: J. Rare Metals Vol. 26 (2007), p.247.

[17] E. -G. Fu, D. -M. Zhuang, G. Zhang et al.: J. Appl. Sur. Sci. Vol. 217 (2003) , p.88.