Implementation of ZnO Nanorods as Sensing Elements for a Surface Acoustic Wave Sensor

Abstract:

The limited sensitivity of thinfilm based sensors has motivated the search for sensing structures and materials with greater sensing performance. Although thinfilm based SAW devices have been used as force, pressure, chemical and gas sensors so far. It is limited by the exposed sensing surface of the thinfilm. A feasibility study has been done by implementing the ZnO nanorods (NRs) to enhance the device sensitivity by greatly increase the exposed sensing surface. The implementation of these ZnO NRs as sensing elements is expected to enhance the sensing power due to the large surface to volume ratio. The sensing mechanism in this design is by detecting the minute change of seismic mass for ZnO NRs using surface acoustic wave before and after the attachment of reacting chemical liquid and gas substance.

• Periodical: Materials Science Forum (Volumes 663-665)
• Pages: 563-567
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.663-665.563
• Online since: November 2010
• Authors: Chang Fu Dee, Kean C. Aw, Bryon Wright, Xiao Dong Yan, Chong Wen Zou, Wei Gao, Muhamad Mat Salleh, Burhanuddin Yeop Majlis, Jong Duk Lee
• Keywords: Interdigital Electrode, Surface Acoustic Wave (SAW) Sensor, ZnO Nanorod

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