Codoping Effects and Electrical Properties in Sol-Gel Li-Al Doped Zinc Oxide
Li and Al codoped ZnO (LAZO) thin films have been prepared by sol-gel method. The electrical and structural properties of the LAZO films have been investigated. X-ray diffraction (XRD) results showed that the prepared LAZO films had a polycrystalline hexagonal wurtzite structure. X-ray photoelectron spectrometer (XPS) measurements indicated that our sol-gel prepared films were of high purity and codoped with Li and Al evidenced by peaks centered at 74.1 and 55.6 eV. The resulting LAZO films were p-type, and had a low resistivity in the range of 10-3~100 Ωcm, and high carrier concentration in the range of 1014~1018 cm-3.
Yuan Ming Huang
H. E. Nian et al., "Codoping Effects and Electrical Properties in Sol-Gel Li-Al Doped Zinc Oxide", Materials Science Forum, Vols. 663-665, pp. 546-550, 2011