Application of Scanning Confocal Electron Microscopy to Nanomaterials and the Improvement in Resolution by Image Processing

Abstract:

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Scanning confocal electron microscopy (SCEM) is a novel technique for threedimensional observation with a nanometer-scale resolution. Annular dark field (ADF) SCEM imaging has been demonstrated to have better depth resolution than bright field (BF) SCEM imaging. However, the depth resolution of ADF-SCEM images is limited by the vertical probe size determined by spherical aberration and convergence angle. Therefore, we attempted to employ a deconvolution image processing method to improve the depth resolution of SCEM images. The result of the deconvolution process for vertically sliced SCEM images showed the improvement in the depth resolution by 35-40%.

Info:

Periodical:

Materials Science Forum (Volumes 675-677)

Edited by:

Yi Tan and Dongying Ju

Pages:

259-262

DOI:

10.4028/www.scientific.net/MSF.675-677.259

Citation:

X. Zhang et al., "Application of Scanning Confocal Electron Microscopy to Nanomaterials and the Improvement in Resolution by Image Processing", Materials Science Forum, Vols. 675-677, pp. 259-262, 2011

Online since:

February 2011

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Price:

$35.00

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