Application of Scanning Confocal Electron Microscopy to Nanomaterials and the Improvement in Resolution by Image Processing

X. Zhang; Masaki Takeguchi; Ayako Hashimoto; Kazutaka Mitsuishi; Masayuki Shimojo

doi:10.4028/www.scientific.net/MSF.675-677.259

Paper Titles

Band Gap Widening and Quantum Confinement Effects of ZnO Nanowires by First-Principles Calculation
p.243

Study on Nanometer Size Structures in the Cr-Mo Electroplated Layer Using Transmission Electron Microscopy and Positron Lifetime Measurement
p.247

Microwave Hydrothermal Synthesis of GaN Nanorods
p.251

Preparation and Morphological Characteristics of Cellulose Micro/Nano Fibrils
p.255

Application of Scanning Confocal Electron Microscopy to Nanomaterials and the Improvement in Resolution by Image Processing
p.259

Simulation of Nano-Indentation of Nano SiC Ceramic Micro-Component
p.263

Synthesis and Characterization of Nanocrystalline SnO₂ Powder
p.267

Preparation of Chitosan/Poly(vinyl Alcohol) Blend Nanofibers Containing Ag-SiO₂ Nanoparticles via Electrospinning
p.271

Electrospun Tin Oxide Nanofibers with Different Precursor Solution
p.275

HomeMaterials Science ForumMaterials Science Forum Vols. 675-677Application of Scanning Confocal Electron...

Application of Scanning Confocal Electron Microscopy to Nanomaterials and the Improvement in Resolution by Image Processing

Abstract:

Scanning confocal electron microscopy (SCEM) is a novel technique for threedimensional observation with a nanometer-scale resolution. Annular dark field (ADF) SCEM imaging has been demonstrated to have better depth resolution than bright field (BF) SCEM imaging. However, the depth resolution of ADF-SCEM images is limited by the vertical probe size determined by spherical aberration and convergence angle. Therefore, we attempted to employ a deconvolution image processing method to improve the depth resolution of SCEM images. The result of the deconvolution process for vertically sliced SCEM images showed the improvement in the depth resolution by 35-40%.

You might also be interested in these eBooks

Advanced Material Science and Technology

View Preview

Info:

Periodical:

Materials Science Forum (Volumes 675-677)

Pages:

259-262

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.675-677.259

Citation:

Cite this paper

Online since:

February 2011

Authors:

X. Zhang, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Masayuki Shimojo

Keywords:

Deconvolution, Image Processing, Nanomaterial, Three-Dimensional SCEM Images

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] P. E. Batson, N. Dellby, and O. L. Krivanek: Nature Vol. 418 (2002), p.617.

Google Scholar

[2] P. D. Nellist, G. Behan, A. I. Kirkland and C. J. D. Hetherington: Appl. Phys. Lett. Vol. 89 (2006), 124105.

Google Scholar

[3] K. Mitsuishi, K. Iakoubovskii, M. Takeguchi, M. Shimojo, A. Hashimoto and K. Furuya: Ultramicrosc. Vol. 108 (2008), p.981.

DOI: 10.1016/j.ultramic.2008.04.005

Google Scholar

[4] S. P. Frigo, Z. H. Levine and N. J. Zaluzec: Appl. Phys. Lett. Vol. 81 (2002), p.2112.

Google Scholar

[5] M. Takeguchi, A. Hashimoto, M. Shimojo, K. Mitsuishi and K. Furuya: J. Electron Microsc. Vol. 57 (2008), p.123.

Google Scholar

[6] A. Hashimoto, M. Shimojo, K. Mitsuishi and M. Takeguchi: J. Appl. Phys. Vol. 106 (2009), 086101.

Google Scholar

[7] A. Hashimoto, M. Shimojo, K. Mitsuishi and M. Takeguchi: Microsc. Microanal. Vol. 16 (2010) , p.233.

Google Scholar