Effect of Sputtering Process Conditions on Microstructure and Mechanical Properties of Pt-Fe Nano Film
One of the vertical magnetic recordings medium materials of the hard disk drive (HDD) is a Pt-Fe thin film. The development of ultra-high density magnetic recording medium in next generation is expected the magnetic disks such as HDD with capacity enlargement of the data. In order to study effectiveness of the proposed sputtering method, we evaluated micro structure, magnetic and the mechanical properties of a Pt-Fe thin film by some sputtering process conditions. From research results, effect sputtering conditions on micro-structure and mechanical properties of Pt-Fe nano film are verified.
Yi Tan and Dongying Ju
S. Ishiguro et al., "Effect of Sputtering Process Conditions on Microstructure and Mechanical Properties of Pt-Fe Nano Film", Materials Science Forum, Vols. 675-677, pp. 655-658, 2011