Study of Y2O3/Er2O3 Multilayered Coatings Deposited by Magnetron Sputtering
The yttria-erbia multilayered coatings were prepared on 316L stainless steel substrates by bipolar pulse magnetron sputtering. Structures of these coatings were examined by X-ray diffraction and scanning electron microscopy. Bonding strength of these coatings on 316L stainless steel substrates was measured by scratch tester. Nano-hardness of these coatings was measured by nano-indenter. Comparative studies of the mechanical properties of the single-layered yttria coatings and multilayered coatings were conducted, and the seven layered coatings presented the highest bonding strength and nano-hardness as well as elastic modulus.
Yafang Han, Fusheng Pan, Jianmao Tang, Chungen Zhou
J. Liu et al., "Study of Y2O3/Er2O3 Multilayered Coatings Deposited by Magnetron Sputtering", Materials Science Forum, Vol. 686, pp. 641-645, 2011